Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures

  1. Garcia, H.
  2. Castán, H.
  3. Gomez, A.
  4. Dueñas, S.
  5. Bailón, L.
  6. Kukli, K.
  7. Kariniemi, M.
  8. Kemell, M.
  9. Niinistö, J.
  10. Ritala, M.
  11. Leskelä, M.
Proceedings:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011

ISBN: 9781424478637

Year of publication: 2011

Type: Conference paper

DOI: 10.1109/SCED.2011.5744209 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus