Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures
- Garcia, H.
- Castán, H.
- Gomez, A.
- Dueñas, S.
- Bailón, L.
- Kukli, K.
- Kariniemi, M.
- Kemell, M.
- Niinistö, J.
- Ritala, M.
- Leskelä, M.
Actes de conférence:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
ISBN: 9781424478637
Année de publication: 2011
Type: Communication dans un congrès
