Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach

  1. Fisicaro, G.
  2. Pelaz, L.
  3. Aboy, M.
  4. Lopez, P.
  5. Italia, M.
  6. Huet, K.
  7. Cristiano, F.
  8. Essa, Z.
  9. Yang, Q.
  10. Bedel-Pereira, E.
  11. Hackenberg, M.
  12. Pichler, P.
  13. Quillec, M.
  14. Taleb, N.
  15. Magna, A.L.
Aktak:
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

ISBN: 9781467357364

Argitalpen urtea: 2013

Orrialdeak: 33-36

Mota: Biltzar ekarpena

DOI: 10.1109/SISPAD.2013.6650567 GOOGLE SCHOLAR
Datuen iturria: Scopus