Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach

1. Fisicaro, G.
2. Pelaz, L.
3. Aboy, M.
4. Lopez, P.
5. Italia, M.
6. Huet, K.
7. Cristiano, F.
8. Essa, Z.
9. Yang, Q.
10. Bedel-Pereira, E.
11. Hackenberg, M.
12. Pichler, P.
13. Quillec, M.
14. Taleb, N.
15. Magna, A.L.