2 MeV electron irradiation effects on bulk and interface of atomic layer deposited high-k gate dielectrics on silicon

1. García, H.
2. Castán, H.
3. Dueñas, S.
4. Bailón, L.
5. Campabadal, F.
6. Rafí, J.M.
7. Zabala, M.
8. Beldarrain, O.
9. Ohyama, H.
10. Takakura, K.
11. Tsunoda, I.