On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon

  1. Marqués, L.A.
  2. Aboy, M.
  3. Santos, I.
  4. López, P.
  5. Cristiano, F.
  6. La Magna, A.
  7. Huet, K.
  8. Tabata, T.
  9. Pelaz, L.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2019

Volume: 458

Pages: 179-183

Type: Article

DOI: 10.1016/J.NIMB.2018.09.030 GOOGLE SCHOLAR lock_openUVADOC editor