Symposium I: Silicon and germanium issues for future CMOS devices

  1. Pelaz, L.
  2. Mirabella, S.
  3. Larsen, A.N.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2010

Volume: 518

Issue: 9

Pages: 2299-2300

Type: Editorial

DOI: 10.1016/J.TSF.2009.12.103 GOOGLE SCHOLAR
Data source: Scopus