Josep M.
Montserrat
Publications by the researcher in collaboration with Josep M. Montserrat (4)
2007
-
Boron diffusion and activation in SOI and bulk Si: The role of the buried interface
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 257, Núm. 1-2 SPEC. ISS., pp. 152-156
-
Boron electrical activation in SOI compared to bulk Si substrates
2007 Spanish Conference on Electron Devices, Proceedings
1995
-
Ability of capacitance–voltage transient technique to study spatial distribution and electric field dependence of emission properties of deep levels in semiconductors
Materials Science and Technology (United Kingdom), Vol. 11, Núm. 10, pp. 1074-1078
1994
-
Characterization of the damage induced in boron-implanted and RTA annealed silicon by the capacitance-voltage transient technique
Semiconductor Science and Technology, Vol. 9, Núm. 9, pp. 1637-1648