Publicaciones en las que colabora con Emilio Lora-Tamayo D'Ocón (8)

1993

  1. Electrical characterization of MOS structures fabricated on SF6 and SF6 + C2CIF5 reactive ion etched silicon

    Nuclear Inst. and Methods in Physics Research, B, Vol. 80-81, Núm. PART 2, pp. 1362-1366

1992

  1. A study of metal-oxide-semiconductor capacitors fabricated on SF 6 and SF6+Cl2 reactive-ion-etched Si

    Journal of Applied Physics, Vol. 71, Núm. 6, pp. 2710-2716

  2. Characterization of the Electrical Damage due to Polysilicon RIE(SF6+ CL2Plasma) Etching

    Journal of the Electrochemical Society, Vol. 139, Núm. 1, pp. 193-195

1990

  1. Interface state density measurement in MOS structures by analysis of the thermally stimulated conductance

    Solid State Electronics, Vol. 33, Núm. 8, pp. 987-992

  2. Rie-induced damage in MOS structures

    Solid State Electronics, Vol. 33, Núm. 11, pp. 1419-1423

1989

  1. Constant-capacitance deep-level optical spectroscopy

    Solid State Electronics, Vol. 32, Núm. 4, pp. 287-293