Departamento
Electricidad y Electrónica
Aportaciones congreso (4) Publicaciones en las que ha participado algún/a investigador/a
1999
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Atomistic simulations of ion implantation and diffusion
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
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Defects and diffusion in MeV implanted silicon
APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2
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Fundamental diffusion issues for deep-submicron device processing
Technical Digest - International Electron Devices Meeting
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Thermally induced improvements on SiNx:H/lnP devices
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films