Aportaciones congreso (4) Publicaciones en las que ha participado algún/a investigador/a

1999

  1. Atomistic simulations of ion implantation and diffusion

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

  2. Defects and diffusion in MeV implanted silicon

    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2

  3. Fundamental diffusion issues for deep-submicron device processing

    Technical Digest - International Electron Devices Meeting

  4. Thermally induced improvements on SiNx:H/lnP devices

    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films