Department
Electricity and Electronics
Conference papers (4) Publications in which a researcher has participated
1999
-
Atomistic simulations of ion implantation and diffusion
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
-
Defects and diffusion in MeV implanted silicon
APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2
-
Fundamental diffusion issues for deep-submicron device processing
Technical Digest - International Electron Devices Meeting
-
Thermally induced improvements on SiNx:H/lnP devices
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films