Atomic scale simulations of arsenic ion implantation and annealing in silicon
- Caturla, M.-J.
- Diaz de la Rubia, T.
- Jaraiz, M.
- Gilmer, G.H.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1996
Volume: 396
Pages: 45-50
Type: Conference paper