Low energy ion implantation simulation using a modified binary collision approximation code

  1. Arias, J.
  2. Jaraiz, M.
  3. Pelaz, L.
  4. Bailón, L.A.
  5. Barbolla, J.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1995

Volume: 102

Issue: 1-4

Pages: 228-231

Type: Article

DOI: 10.1016/0168-583X(95)80146-D GOOGLE SCHOLAR
Data source: Scopus