Dose effects on amorphous silicon sputtering by argon ions: A molecular dynamics simulation
ISSN: 0021-8979
Year of publication: 1997
Volume: 81
Issue: 3
Pages: 1488-1494
Type: Article
ISSN: 0021-8979
Year of publication: 1997
Volume: 81
Issue: 3
Pages: 1488-1494
Type: Article