Enhanced modelization of ion implant simulation in compound semiconductors

  1. Hernández-Mangas, J.M.
  2. Enriquez, L.
  3. Arias, J.
  4. Jaraíz, M.
  5. Bailón, L.
Journal:
Solid-State Electronics

ISSN: 0038-1101

Year of publication: 2002

Volume: 46

Issue: 9

Pages: 1315-1324

Type: Article

DOI: 10.1016/S0038-1101(02)00072-2 GOOGLE SCHOLAR
Data source: Scopus