Enhanced modelization of ion implant simulation in compound semiconductors
ISSN: 0038-1101
Année de publication: 2002
Volumen: 46
Número: 9
Pages: 1315-1324
Type: Article
ISSN: 0038-1101
Année de publication: 2002
Volumen: 46
Número: 9
Pages: 1315-1324
Type: Article