Dopant redistribution effects in preamorphized silicon during low temperature annealing
- Venezia, V.C.
- Duffy, R.
- Pelaz, L.
- Aboy, M.
- Heringa, A.
- Griffin, P.B.
- Wang, C.C.
- Hopstaken, M.J.P.
- Tamminga, Y.
- Dao, T.
- Pawlak, B.J.
- Roozeboom, F.
Aktak:
Technical Digest - International Electron Devices Meeting
ISSN: 0163-1918
Argitalpen urtea: 2003
Orrialdeak: 489-492
Mota: Biltzar ekarpena