Atomistic modeling of defect evolution in Si for amorphizing and subamorphizing implants

  1. Lopez, P.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Santos, I.
  5. Aboy, M.
  6. Barbolla, J.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2004

Volume: 114-115

Issue: SPEC. ISS.

Pages: 82-87

Type: Conference paper

DOI: 10.1016/J.MSEB.2004.07.040 GOOGLE SCHOLAR
Data source: Scopus