Atomistic modeling of defect evolution in Si for amorphizing and subamorphizing implants

  1. Lopez, P.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Santos, I.
  5. Aboy, M.
  6. Barbolla, J.
Aldizkaria:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Argitalpen urtea: 2004

Alea: 114-115

Zenbakia: SPEC. ISS.

Orrialdeak: 82-87

Mota: Biltzar ekarpena

DOI: 10.1016/J.MSEB.2004.07.040 GOOGLE SCHOLAR
Datuen iturria: Scopus