Atomistic modeling of defect evolution in Si for amorphizing and subamorphizing implants

  1. Lopez, P.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Santos, I.
  5. Aboy, M.
  6. Barbolla, J.
Revue:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Année de publication: 2004

Volumen: 114-115

Número: SPEC. ISS.

Pages: 82-87

Type: Communication dans un congrès

DOI: 10.1016/J.MSEB.2004.07.040 GOOGLE SCHOLAR
La source de données: Scopus