Atomistic modeling of ion beam induced amorphization in silicon

  1. Pelaz, L.
  2. Marqués, L.A.
  3. Aboy, M.
  4. Barbolla, J.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2004

Volume: 216

Issue: 1-4

Pages: 41-45

Type: Conference paper

DOI: 10.1016/J.NIMB.2003.11.018 GOOGLE SCHOLAR
Data source: Scopus