Atomistic modeling of ion beam induced amorphization in silicon

  1. Pelaz, L.
  2. Marqués, L.A.
  3. Aboy, M.
  4. Barbolla, J.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2004

Volumen: 216

Número: 1-4

Pages: 41-45

Type: Communication dans un congrès

DOI: 10.1016/J.NIMB.2003.11.018 GOOGLE SCHOLAR
La source de données: Scopus