Atomistic modeling of ion beam induced amorphization in silicon
ISSN: 0168-583X
Year of publication: 2005
Volume: 241
Issue: 1-4
Pages: 501-505
Type: Conference paper
ISSN: 0168-583X
Year of publication: 2005
Volume: 241
Issue: 1-4
Pages: 501-505
Type: Conference paper