Characterization of octadecaborane implantation into Si using molecular dynamics
- Marqués, L.A.
- Pelaz, L.
- Santos, I.
- Venezia, V.C.
ISSN: 1098-0121, 1550-235X
Year of publication: 2006
Volume: 74
Issue: 20
Type: Article
ISSN: 1098-0121, 1550-235X
Year of publication: 2006
Volume: 74
Issue: 20
Type: Article