Characterization of octadecaborane implantation into Si using molecular dynamics

  1. Marqués, L.A.
  2. Pelaz, L.
  3. Santos, I.
  4. Venezia, V.C.
Aldizkaria:
Physical Review B - Condensed Matter and Materials Physics

ISSN: 1098-0121,  1550-235X

Argitalpen urtea: 2006

Alea: 74

Zenbakia: 20

Mota: Artikulua

DOI: 10.1103/PHYSREVB.74.201201 GOOGLE SCHOLAR
Datuen iturria: Scopus