Characterization of octadecaborane implantation into Si using molecular dynamics

  1. Marqués, L.A.
  2. Pelaz, L.
  3. Santos, I.
  4. Venezia, V.C.
Revue:
Physical Review B - Condensed Matter and Materials Physics

ISSN: 1098-0121,  1550-235X

Année de publication: 2006

Volumen: 74

Número: 20

Type: Article

DOI: 10.1103/PHYSREVB.74.201201 GOOGLE SCHOLAR
La source de données: Scopus