Growth and characterization of 3C-SiC films for Micro Electro Mechanical Systems (MEMS) applications

1. Bosi, M.
2. Watts, B.E.
3. Attolini, G.
4. Ferrari, C.
5. Frigeri, C.
6. Salviati, G.
7. Poggi, A.
8. Mancarella, F.
9. Roncaglia, A.
10. Martínez, O.
11. Hortelano, V.