Growth and characterization of 3C-SiC films for Micro Electro Mechanical Systems (MEMS) applications
- Bosi, M.
- Watts, B.E.
- Attolini, G.
- Ferrari, C.
- Frigeri, C.
- Salviati, G.
- Poggi, A.
- Mancarella, F.
- Roncaglia, A.
- Martínez, O.
- Hortelano, V.
ISSN: 1528-7483, 1528-7505
Argitalpen urtea: 2009
Alea: 9
Zenbakia: 11
Orrialdeak: 4852-4859
Mota: Artikulua