Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates

  1. Gómez, A.
  2. Dueñas, S.
  3. Castán, H.
  4. García, H.
  5. Bailón, L.
  6. Kukli, K.
  7. Niinistö, J.
  8. Ritala, M.
  9. Leskelä, M.
Proceedings:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Year of publication: 2009

Pages: 227-230

Type: Conference paper

DOI: 10.1109/SCED.2009.4800472 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus