Electron irradiation effects on atomic layer deposited high-k gate dielectrics

  1. García, H.
  2. Castán, H.
  3. Dueñas, S.
  4. Bailón, L.
  5. Campabadal, F.
  6. Rafi, J.M.
  7. Zabala, M.
  8. Beldarrain, O.
  9. Ohyama, H.
  10. Takakura, K.
  11. Tsunoda, I.
Proceedings:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781566779036

Year of publication: 2011

Volume: 41

Issue: 3

Pages: 349-359

Type: Conference paper

DOI: 10.1149/1.3633051 GOOGLE SCHOLAR
Data source: Scopus