Dominant iron gettering mechanism in p/p+ silicon wafers

  1. Lin, W.
  2. Benton, J.L.
  3. Pinacho, R.
  4. Ramappa, D.A.
  5. Henley, W.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2000

Volume: 77

Issue: 2

Pages: 241-243

Type: Article

DOI: 10.1063/1.126937 GOOGLE SCHOLAR
Data source: Scopus