MARIA ESTHER
MARTIN GARCIA
PROFESORES TITULARES DE UNIVERSIDAD
Universitat de Barcelona
Barcelona, EspañaPublicacions en col·laboració amb investigadors/es de Universitat de Barcelona (5)
1997
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Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures
Thin Solid Films, Vol. 311, Núm. 1-2, pp. 225-229
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Raman microstructural analysis of silicon-on-insulator formed by high dose oxygen ion implantation: As-implanted structures
Journal of Applied Physics, Vol. 82, Núm. 8, pp. 3730-3735
1994
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Optical characterisation of SIMOX structures formed by successive implantation and annealing
Nuclear Inst. and Methods in Physics Research, B, Vol. 84, Núm. 2, pp. 275-280
1992
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In depth resolved analysis of SIMOX materials by optical characterization techniques
1991 IEEE International SOI Conference Proceedings
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Raman characterization of SOI-SIMOX structures
Materials Letters, Vol. 15, Núm. 1-2, pp. 122-126