Atomistic analysis of defect evolution and transient enhanced diffusion in silicon
ISSN: 0021-8979
Year of publication: 2003
Volume: 94
Issue: 2
Pages: 1013-1018
Type: Article
ISSN: 0021-8979
Year of publication: 2003
Volume: 94
Issue: 2
Pages: 1013-1018
Type: Article