Boron redistribution in pre-amorphized Si during thermal annealing

  1. Pelaz, L.
  2. Aboy, M.
  3. Duffy, R.
  4. Venezia, V.
  5. Marqués, L.A.
  6. López, P.
  7. Santos, I.
  8. Hernández, J.
  9. Bailón, L.A.
  10. Barbolla, J.
Proceedings:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Year of publication: 2005

Volume: 2005

Pages: 431-434

Type: Conference paper

DOI: 10.1109/SCED.2005.1504473 GOOGLE SCHOLAR
Data source: Scopus