Boron redistribution in pre-amorphized Si during thermal annealing

  1. Pelaz, L.
  2. Aboy, M.
  3. Duffy, R.
  4. Venezia, V.
  5. Marqués, L.A.
  6. López, P.
  7. Santos, I.
  8. Hernández, J.
  9. Bailón, L.A.
  10. Barbolla, J.
Aktak:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Argitalpen urtea: 2005

Alea: 2005

Orrialdeak: 431-434

Mota: Biltzar ekarpena

DOI: 10.1109/SCED.2005.1504473 GOOGLE SCHOLAR
Datuen iturria: Scopus