Boron diffusion and activation in SOI and bulk Si: The role of the buried interface

  1. Aboy, M.
  2. Pelaz, L.
  3. Montserrat, J.
  4. Bermúdez, F.J.
  5. Hamilton, J.J.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2007

Volume: 257

Issue: 1-2 SPEC. ISS.

Pages: 152-156

Type: Article

DOI: 10.1016/J.NIMB.2006.12.157 GOOGLE SCHOLAR
Data source: Scopus