Boron diffusion and activation in SOI and bulk Si: The role of the buried interface

  1. Aboy, M.
  2. Pelaz, L.
  3. Montserrat, J.
  4. Bermúdez, F.J.
  5. Hamilton, J.J.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2007

Alea: 257

Zenbakia: 1-2 SPEC. ISS.

Orrialdeak: 152-156

Mota: Artikulua

DOI: 10.1016/J.NIMB.2006.12.157 GOOGLE SCHOLAR
Datuen iturria: Scopus