Boron diffusion and activation in SOI and bulk Si: The role of the buried interface
ISSN: 0168-583X
Année de publication: 2007
Volumen: 257
Número: 1-2 SPEC. ISS.
Pages: 152-156
Type: Article
ISSN: 0168-583X
Année de publication: 2007
Volumen: 257
Número: 1-2 SPEC. ISS.
Pages: 152-156
Type: Article