Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Bailón, L.
  5. Kukli, K.
  6. Lu, J.
  7. Ritala, M.
  8. Leskelä, M.
Journal:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Year of publication: 2008

Volume: 354

Issue: 2-9

Pages: 404-408

Type: Article

DOI: 10.1016/J.JNONCRYSOL.2007.07.051 GOOGLE SCHOLAR
Data source: Scopus