David J.
Eaglesham
Publications dans lesquelles il/elle collabore avec David J. Eaglesham (9)
1998
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Atomistic modeling of point and extended defects in crystalline materials
Materials Research Society Symposium - Proceedings
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Ion mass influence on transient enhanced diffusion and boron clustering in silicon: Deviation from the "+1" model
Journal of Applied Physics, Vol. 83, Núm. 11, pp. 6182-6184
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Modeling of the ion mass effect on transient enhanced diffusion: Deviation from the "+1" model
Applied Physics Letters, Vol. 73, Núm. 10, pp. 1421-1423
1997
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Atomistic model of transient enhanced diffusion and clustering of boron in silicon
Materials Research Society Symposium - Proceedings
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B diffusion and clustering in ion implanted Si: The role of B cluster precursors
Applied Physics Letters, Vol. 70, Núm. 17, pp. 2285-2287
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Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
Journal of Applied Physics, Vol. 81, Núm. 9, pp. 6031-6050
1996
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Simulation of cluster evaporation and transient enhanced diffusion in silicon
Applied Physics Letters, Vol. 68, Núm. 17, pp. 2395-2397
1995
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Ion implantation and transient enhanced diffusion
Technical Digest - International Electron Devices Meeting
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Simulation of cluster evaporation and transient enhanced diffusion in silicon
Applied Physics Letters, pp. 2395