Science of Materials and Metallurgic Engineering, Graphic Expression in Engineering, Mapping Engineering, Geodesy and Ph
Department
University of Helsinki
Helsinki, FinlandiaPublications in collaboration with researchers from University of Helsinki (11)
2011
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Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3 -based metal-insulator-metal capacitors grown by atomic layer deposition
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
2009
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Comparison between the electrical properties of atomic layer deposited thin ZrO2 films processed from cyclopentadienyl precursors
Microelectronic Engineering, Vol. 86, Núm. 7-9, pp. 1689-1691
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Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
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Electrical characterization of high-k based MIS capacitors using flat-band voltage transients
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
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Electrical properties of thin zirconium and hafnium oxide high-k gate dielectrics grown by atomic layer deposition from cyclopentadienyl and ozone precursors
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 27, Núm. 1, pp. 389-393
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Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectrics
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 27, Núm. 1, pp. 416-420
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Study of atomic layer deposited zirconium oxide thin films by using mono-cyclopentadienyl based precursors
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
2008
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Comparative study of flatband voltage transients on high-k dielectric-based metal-insulator-semiconductor capacitors
Journal of the Electrochemical Society, Vol. 155, Núm. 11
2007
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Electrical properties of atomic-layer-deposited thin gadolinium oxide high- k gate dielectrics
Journal of the Electrochemical Society, Vol. 154, Núm. 10
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Study of atomic layer deposited gadolinium oxide thin films on silicon
Materials Research Society Symposium Proceedings